Measurement of Au deposition rates with low-energy mass separated ion beam deposition apparatus

Au deposition rates were measured as a function of Au ion injection energy with the use of a low-energy mass separated ion beam deposition apparatus. Unlike similar measurements reported earlier, in the present experiments, the quality of ion beams (i.e., their mass and energy spectra) was also examined. In the deposition experiments, the Au ion beam was injected into a gold-coated quartz crystal microbalance (QCM), which measures the mass of deposited Au atoms for the given ion beam current. The measured deposition rates in the energy range of 40-200 eV are consistent with those reported in earlier works.