A new type of silicon drift detector with curved surface

被引:0
|
作者
Cai, Lu [1 ]
Yu, Min [1 ]
Tian, Dayu [1 ]
Wang, Jinyan [1 ]
Jin, Yufeng [1 ]
机构
[1] National Key Laboratory of Nano/Micro Fabrication Technology, Institute of Microelectronics, Peking University, Beijing, 100871, China
来源
Proceedings of SPIE - The International Society for Optical Engineering | 2011年 / 8191卷
关键词
Compendex;
D O I
International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies
中图分类号
学科分类号
摘要
Silicon
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