High temperature silicon-on-insulator piezoresistive pressure sensitive chip

被引：0
|
作者：
Zhao, Libo [1 ,2 ]
Zhao, Yulong [1 ]
Fang, Xudong [1 ]
Li, Jianbo [1 ]
Li, Yong [2 ]
Jiang, Zhuangde [1 ]
机构：
[1] State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China
[2] State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China
来源：
Hsi-An Chiao Tung Ta Hsueh/Journal of Xi'an Jiaotong University | 2010年 / 44卷 / 09期
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页码：59 / 63
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