Electromagnetically induced transparency-like effect in the optimized silicon micro ring resonators

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作者：
机构：
[1] Key Laboratory of Instrumentation Science and Dynamic Measurement of Ministry of Education, North University of China
[2] Science and Technology on Electronic Test and Measurement Laboratory, North University of China
[3] North University of China, Shuozhou
来源：
Xue, C.-Y. (xuechenyang@nuc.edu.cn) | 1600年 / Chinese Optical Society卷 / 43期
关键词：
Electromagnetically Induced Transparency; Integrated optics; Optical waveguides; Oxidizing annealing; Ring resonator; Silicon-on-insulator; Vertical grating coupling;
D O I：
10.3788/gzxb20144302.0213004
中图分类号：
学科分类号：
摘要：
To realize the electromagnetically induced transparency-like effect on the silicon waveguide, a double ring resonators structure based on silicon-on-insulator was designed and fabricated. By post processing of thermal oxidation annealing under the temperature from 300°C to 1200°C, wet chemical etching with buffered oxide etch and N2 annealing under the temperature of 1000°C, the electromagnetically induced transparency-like curve via the vertical grating coupling method was observed. The effect of different distance between the two resonators to the electromagnetically induced transparency-like curve was analyzed. The Q factor of a single ring in this fabrication was 5.1×104. The measured spectral width of the transparency window was as narrow as 500 MHz.
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