Femtosecond-laser-induced nanofabrication on glass

被引:0
作者
Shibata, Akihiro
Kaneko, Naoto
Suzuki, Shinya
Kodama, Shuhei
Shimizu, Jun
Shimada, Keita
Mizutani, Masayoshi
Kuriyagawa, Tsunemoto
机构
来源
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering | 2015年 / 81卷 / 09期
关键词
Femtosecond-laser; Functional interface; Glass; Nano-sizcd texturing; Poly-silazane; Surface plasmon;
D O I
10.2493/jjspe.81.862
中图分类号
学科分类号
摘要
Nanostructure processing method with high productivity is desired for many practical uses. Recent studies report that femtosecond laser process is expected as one of high productive process. By irradiating femtosecond laser to the polished target surface, it is possible to form a nanostructure on laser irradiation entire area. But this method cannot be easily applied to glass substrate because this method needs to generate surface plasmon polariton by laser irradiation. Our research group invented a new method for forming a nano-sizcd texturing on a glass by using light absorbable metal nanoparticles and glass precursor. We made nano-sizcd surface structure on the glass sample, and showed the anti-reflection effect.
引用
收藏
页码:862 / 866
页数:4
相关论文
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