High-frequency edge reflection type resonators with excellent temperature characteristics

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Murata MFG Co., Ltd, Yasu, Shiga 520-2393, Japan ^{[1
]}

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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2007年 / 46卷 / 7 B期

关键词：

Currently; some duplexers are required to have a good temperature coefficient of frequency (TCF). An Al electrodes/36-48° YX-LiTaO3 substrate; which is used for most surface acoustic wave (SAW) duplexers; does not have a good TCF. Its TCF can be improved by depositing a SiO2 film with a positive TCF on a transversal SAW filter consisting of a substrate with a negative TCF such as LiTaO3 and LiNbO3. However; resonator-type SAW devices combining a SiO2 film; Al electrodes; and a LiTaO3 substrate do not show good frequency characteristics because of their small reflection coefficient and so on. It is considered as a countermeasure that a resonator using the reflection of a shear horizontal (SH) wave at substrate edges will show good frequency characteristics because its reflection coefficient is very large regardless of the Al electrode and SiO 2 films thicknesses. It has been difficult to obtain a high-frequency edge reflection resonator using ordinary machining techniques because it requires extremely fine substrate edges. However; a high-frequency edge reflection resonator with a good TCF and excellent frequency characteristics has been realized using our newly developed method of obtaining fine edges. © 2007 The Japan Society of Applied Physics;

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页码：4749 / 4753

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