Synthesis and annealing of nanostructured TiO2 films by radio-frequency magnetron sputtering

被引:2
|
作者
Department of Mechanical Engineering, Faculty of Engineering, University of Malaya, 50603 Kuala Lumpur, Malaysia [1 ]
不详 [2 ]
机构
来源
J. Appl. Sci. | 2009年 / 15卷 / 2815-2821期
关键词
Atomic force microscopy;
D O I
10.3923/jas.2009.2815.2821
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
  • [1] Absorption spectra of TiO2 thin films synthesized by the reactive radio-frequency magnetron sputtering of titanium
    Ievlev, V. M.
    Kushchev, S. B.
    Latyshev, A. N.
    Leonova, L. Yu.
    Ovchinnikov, O. V.
    Smirnov, M. S.
    Popova, E. V.
    Kostyuchenko, A. V.
    Soldatenko, S. A.
    SEMICONDUCTORS, 2014, 48 (07) : 848 - 858
  • [2] Absorption spectra of TiO2 thin films synthesized by the reactive radio-frequency magnetron sputtering of titanium
    V. M. Ievlev
    S. B. Kushchev
    A. N. Latyshev
    L. Yu. Leonova
    O. V. Ovchinnikov
    M. S. Smirnov
    E. V. Popova
    A. V. Kostyuchenko
    S. A. Soldatenko
    Semiconductors, 2014, 48 : 848 - 858
  • [3] Hydroxyapatite films deposited on TiN and TiO2 buffer layers by radio-frequency magnetron sputtering:: Comparative study
    Wu, Xiaochen
    Zhong, Xiaoxia
    Zhou, Wei
    Yuan, Luqi
    Shu, Qiwei
    Xia, Yuxing
    ADVANCES IN COMPOSITE MATERIALS AND STRUCTURES, PTS 1 AND 2, 2007, 334-335 : 1133 - +
  • [4] Synthesis of TiO2/Pt/TiO2 multilayer films via radio frequency magnetron sputtering and their enhanced photocatalytic activity
    Ma, Chao
    Dong, Wen
    Fang, Liang
    Zheng, Fengang
    Shen, Mingrong
    Wang, Zhenlin
    THIN SOLID FILMS, 2012, 520 (17) : 5727 - 5732
  • [5] Metal-Semiconductor-Metal Ultraviolet Photodetectors Based on TiO2 Films Deposited by Radio-Frequency Magnetron Sputtering
    Huang, Huolin
    Yang, Weifeng
    Xie, Yannan
    Chen, Xiaping
    Wu, Zhengyun
    IEEE ELECTRON DEVICE LETTERS, 2010, 31 (06) : 588 - 590
  • [6] Thin film transistors based on TiO2 fabricated by using radio-frequency magnetron sputtering
    Shih, W. S.
    Young, S. J.
    Ji, L. W.
    Water, W.
    Meen, T. H.
    Lam, K. T.
    Sheen, J.
    Chu, W. C.
    JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 2010, 71 (12) : 1760 - 1762
  • [7] Hydrophilicity of TiO2 thin films obtained by radio frequency magnetron sputtering deposition
    Sirghi, L
    Aoki, T
    Hatanaka, Y
    THIN SOLID FILMS, 2002, 422 (1-2) : 55 - 61
  • [8] Continuous and Nanostructured TiO2 Films Grown by dc Sputtering Magnetron
    Sanchez, O.
    Vergara, L.
    Climent Font, A.
    de Melo, O.
    Sanz, R.
    Hernandez-Velez, M.
    JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2012, 12 (12) : 9148 - 9155
  • [9] Electrical Properties of ZnO/TiO2 Nanocomposite Film Deposited by Simultaneous Radio-Frequency Magnetron Sputtering
    Saurdi, I.
    Mamat, M. H.
    Abdullah, M. H.
    Musa, M. Z.
    Rusop, M.
    2012 10TH IEEE INTERNATIONAL CONFERENCE ON SEMICONDUCTOR ELECTRONICS (ICSE), 2012, : 82 - 85
  • [10] Iridium thin films deposited by radio-frequency magnetron sputtering
    El Khakani, MA
    Chaker, M
    Le Drogoff, B
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1998, 16 (02): : 885 - 888