Advanced ceramics synthesized by inductively coupled plasma with inner RF antenna

被引:0
作者
Nakagaki, Keita [1 ,2 ]
Yamauchi, Toshihiko [2 ]
Kanno, Yoshinori [1 ]
Kobayashi, Seiji [2 ]
机构
[1] Interdisciplinary Graduate School of Medicine and Engineering, University of Yamanashi, 4-3-11 Takeda, Kofu 400-8511, Japan
[2] Quantum Beam Science Directorate, Japan Atomic Energy Agency, 2-4 Shirakata Shirane, Tokai, Ibaraki 319-1195, Japan
来源
Japanese Journal of Applied Physics | 2008年 / 47卷 / 1 PART 2期
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6;
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摘要
Journal article (JA)
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页码:797 / 799
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