Design and fabrication of micro needles array based on UV-LIGA technology

被引:0
|
作者
机构
[1] Liao, Zhe-Xun
[2] Li, Yi-Gui
[3] Zhu, Jun
来源
Li, Y.-G. (ygli@sjtu.edu.cn) | 1848年 / Shanghai Jiaotong University卷 / 46期
关键词
6;
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
  • [21] The optimized design of accelerometer for the UV-LIGA process
    Gao, Y. L.
    Jin, P.
    Liu, N.
    Tan, J. B.
    4TH INTERNATIONAL SYMPOSIUM ON INSTRUMENTATION SCIENCE AND TECHNOLOGY (ISIST' 2006), 2006, 48 : 1465 - 1470
  • [22] Study on process of microinjection metal mold based on UV-LIGA technology
    Du, Li-Qun
    Qin, Jiang
    Liu, Hai-Jun
    Liu, Chong
    Yu, Tong-Min
    Weixi Jiagong Jishu/Microfabrication Technology, 2006, (05): : 51 - 54
  • [23] Micro Electroformed Ni-P Alloy Parts by extended UV-LIGA Technology
    Guo, Yuhua
    Wang, Yingnan
    Xie, Longhan
    EQUIPMENT MANUFACTURING TECHNOLOGY AND AUTOMATION, PTS 1-3, 2011, 317-319 : 1635 - +
  • [24] Fabrication of an electrostatic lens array with separate electrodes and shield membranes using the UV-LIGA process
    Ono, H
    Nagae, K
    Shimada, Y
    Maehara, H
    Yagi, T
    Muraki, M
    Okunuki, M
    TRANSDUCERS '01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2001, : 1586 - 1589
  • [25] Fabrication of an electrostatic lens array with separate electrodes and shield membranes using the UV-LIGA process
    Ono, H
    Nagae, K
    Shimada, Y
    Maehara, H
    Yagi, T
    Muraki, M
    Okunuki, M
    SENSORS AND ACTUATORS A-PHYSICAL, 2002, 97-8 : 416 - 421
  • [26] Fabrication of microchannel cavity using a modified UV-LIGA process
    Zhuang, Jian
    Yu, Tong-Min
    Wang, Min-Jie
    Du, Li-Qun
    Harbin Gongye Daxue Xuebao/Journal of Harbin Institute of Technology, 2009, 41 (05): : 106 - 109
  • [27] Study on electrocrystallization of pulse micro-electroforming in UV-LIGA
    Shao, Ligeng
    Du, Liqun
    Wang, Liding
    2007 IEEE INTERNATIONAL CONFERENCE ON MECHATRONICS AND AUTOMATION, VOLS I-V, CONFERENCE PROCEEDINGS, 2007, : 2513 - 2517
  • [28] Experiment design and UV-LIGA microfabrication technology to study the fracture toughness of Ni microstructures
    Dai, W
    Oropeza, C
    Lian, K
    Wang, WJ
    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2006, 12 (04): : 306 - 314
  • [29] Multi-layer microstructure fabrication by combining bulk silicon micromachining and UV-LIGA technology
    Jing, Xiang-meng
    Chen, Di
    Fang, Dong-ming
    Huang, Chuang
    Liu, Jing-quan
    Chen, Xiang
    MICROELECTRONICS JOURNAL, 2007, 38 (01) : 120 - 124
  • [30] Experiment design and UV-LIGA microfabrication technology to study the fracture toughness of Ni microstructures
    Wen Dai
    Catherine Oropeza
    Kun Lian
    Wanjun Wang
    Microsystem Technologies, 2006, 12 : 306 - 314