Design and fabrication of micro needles array based on UV-LIGA technology

被引：0
|
作者：
机构：
[1] Liao, Zhe-Xun
[2] Li, Yi-Gui
[3] Zhu, Jun
来源：
Li, Y.-G. (ygli@sjtu.edu.cn) | 1848年 / Shanghai Jiaotong University卷 / 46期
关键词：
6;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [1] Design and fabrication of micro-coil sensor array by using UV-LIGA Process
    Xu Zhixiang
    Jiang Fengjuan
    MECHATRONICS AND APPLIED MECHANICS II, PTS 1 AND 2, 2013, 300-301 : 585 - 588
  • [2] Study on UV-LIGA Technology Fabrication of Micro Gear Transmission Device
    Zhang Liyong
    Wang Changlu
    Liu Zhongming
    Lu Ming
    Meng Lingxian
    Zhang Yuanguo
    Zhang Heping
    ADVANCES IN POWER TRANSMISSION SCIENCE AND TECHNOLOGY, 2011, 86 : 273 - +
  • [3] Experiment on Microstructure Fabrication with UV-LIGA Technology
    Zheng, Xiaohu
    2008 INTERNATIONAL CONFERENCE ON OPTICAL INSTRUMENTS AND TECHNOLOGY: MEMS/NEMS TECHNOLOGY AND APPLICATIONS, 2009, 7159
  • [4] Design and fabrication of an electrostatically suspended microgyroscope using UV-LIGA technology
    Cui, Feng
    Chen, Wenyuan
    Zhang, Weiping
    Xiao, Qijun
    Ma, Gaoyin
    Liu, Wu
    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2009, 15 (12): : 1885 - 1896
  • [5] Design and fabrication of an electrostatically suspended microgyroscope using UV-LIGA technology
    Feng Cui
    Wenyuan Chen
    Weiping Zhang
    Qijun Xiao
    Gaoyin Ma
    Wu Liu
    Microsystem Technologies, 2009, 15 : 1885 - 1896
  • [6] Fabrication of 3D metal microstructure based on UV-LIGA and micro-EDM technology
    Du, Li-Qun
    Mo, Shun-Pei
    Zhang, Yu-Sheng
    Liu, Chong
    Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2010, 18 (02): : 363 - 368
  • [7] UV-LIGA fabrication of electromagnetic power micro-relays
    Williams, J
    Wang, WJ
    ISTM/2001: 4TH INTERNATIONAL SYMPOSIUM ON TEST AND MEASUREMENT, VOLS 1 AND 2, CONFERENCE PROCEEDINGS, 2001, : 1 - 9
  • [8] Fabrication of micro-ECM electrode array by combining UV-LIGA with micro electro-discharge machining
    Hu Y.
    Zhu D.
    Li H.
    Zeng Y.
    Ming P.
    Dongnan Daxue Xuebao (Ziran Kexue Ban)/Journal of Southeast University (Natural Science Edition), 2010, 40 (01): : 106 - 110
  • [9] Fabrication of high-aspect-ratio stepped Cu microcolumn array using UV-LIGA technology
    Liqun Du
    Bowen Yuan
    Bingjiang Guo
    Shuai Wang
    Xiaoke Cai
    Microsystem Technologies, 2023, 29 : 999 - 1014
  • [10] Fabrication of high-aspect-ratio stepped Cu microcolumn array using UV-LIGA technology
    Du, Liqun
    Yuan, Bowen
    Guo, Bingjiang
    Wang, Shuai
    Cai, Xiaoke
    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2023, 29 (07): : 999 - 1014
12345