Cryogenic hysteresis and creep characteristics of piezoelectric bimorph scanner

被引：0
|
作者：
Zhang, Xuan [1 ]
Pan, Ming [2 ]
机构：
[1] Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China
[2] The 50th Research Institute, China Electronics Technology Group Corporation, Shanghai 200063, China
来源：
Guangxue Jingmi Gongcheng/Optics and Precision Engineering | 2012年 / 20卷 / 05期
关键词：
D O I：
10.3788/OPE.20122005.1064
中图分类号：
学科分类号：
摘要：
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页码：1064 / 1068
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