Low temperature growth of c-axis oriented AlN films on γ-LiAlO2 by radio frequency magnetron sputtering

被引：0
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作者：
Teng, Hao [1 ,2 ]
Zhou, Shengming [1 ]
Lin, Hui [1 ,2 ]
Huang, Taohua [1 ,2 ]
Han, Ping [3 ]
Zhang, Rong [3 ]
机构：
[1] Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Jiading, Shanghai, 201800, China
[2] Graduate School, Chinese Academy of Science, Beijing, 100039, China
[3] Key Laboratory of Advanced Photonic and Electronic Materials, Department of Physics, Nanjing University, Nanjing, 210093, China
来源：
Journal of Alloys and Compounds | 2009年 / 469卷 / 1-2期
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页码：219 / 223
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