Simple atmospheric-pressure nonthermal plasma-jet system for poly(dimethylsiloxane) bonding process

被引：0
|
作者：
Kim, Kangil [1 ]
Kim, Geunyoung [1 ,2 ]
Oh, Yeongtaek [1 ]
Park, Tae-Gyu [1 ,3 ]
Han, Dong Chul [1 ,3 ]
Yang, Sang Sik [1 ]
机构：
[1] Department of Electrical and Computer Engineering, Ajou University, Suwon, Gyeonggi 443-749, Korea, Republic of
[2] AMED Inc., Seoul 151-742, Korea, Republic of
[3] Korea Bio-IT Foundry Center, IAMD, Seoul National University, Seoul 151-742, Korea, Republic of
来源：
Japanese Journal of Applied Physics | 2012年 / 51卷 / 6 PART 2期
关键词：
Bonding process - Bonding strength - Hydrophilic properties - Modified surfaces - Nonthermal plasma - Polydimethylsiloxane PDMS - Water droplets;
D O I：
06FL15
中图分类号：
学科分类号：
摘要：
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