Effect of femtosecond laser parameters on TiC ceramic micro-hole drilling

被引：0

作者：

Wang, Yuqian ^{[1
]}

Zhang, Junzhan ^{[1
]}

Liu, Yongsheng ^{[2
]}

Yang, Xiaojun ^{[3
]}

Li, Weinan ^{[3
]}

Wang, Chunhui ^{[2
]}

机构：

[1] School of Materials and Mineral Resources, Xi'an University of Architecture and Technology, Xi'an, 710055, Shaanxi

[2] Key Laboratory of Science and technology on Thermostructure Composite Materials Laboratory, Northwestern Polytechnical University, Xi'an, 710072, Shaanxi

[3] State Key Laboratory of Transient Optics and Photonics, Xi'an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi'an, 710119, Shaanxi

来源：

Zhongguo Jiguang/Chinese Journal of Lasers | 2014年 / 41卷 / 10期

关键词：

Assisted gas pressure; Femtosecond laser; Laser fluence; Micro-hole drilling; TiC ceramic; Ultrafast optics;

D O I：

10.3788/CJL201441.1003010

中图分类号：

学科分类号：

摘要：

Drilling micro-holes in TiC ceramic with femtosecond laser in different laser fluence and assisted gas pressure has been demonstrated. Scanning electron microscope (SEM), micrometer X-ray 3D imaging system (Micro-CT) and X-ray photoelectron spectroscopy (XPS) are used to investigate the morphology and chemical bonds of micro-holes. The results show that the circularities of micro-holes at the entry are not less than 99% when the laser fluence varies. The circularities of micro-holes at the exit increase as the laser fluence grows, then it tend to be stable. The maximum value of the circularity at the exit is 95%. The taper of micro-holes increases with the assisted gas pressure. When the laser fluence is 0.51 J/mm2, the taper of micro-holes drilled with 0.3 MPa gas pressure is the best, its long axis taper is -0.13° and the short axis taper is 0.77°. C-C bonds and Ti-C bonds rupture while debris which contains metal Ti, Ti2O3 and TiO2 forms around the micro-holes during laser drilling. Lastly, the mechanism of interactions between laser beam and materials is discussed.

引用

页数：7

共 42 条

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