Effect of femtosecond laser parameters on TiC ceramic micro-hole drilling

被引：0
作者：
Wang, Yuqian [1 ]
Zhang, Junzhan [1 ]
Liu, Yongsheng [2 ]
Yang, Xiaojun [3 ]
Li, Weinan [3 ]
Wang, Chunhui [2 ]
机构：
[1] School of Materials and Mineral Resources, Xi'an University of Architecture and Technology, Xi'an, 710055, Shaanxi
[2] Key Laboratory of Science and technology on Thermostructure Composite Materials Laboratory, Northwestern Polytechnical University, Xi'an, 710072, Shaanxi
[3] State Key Laboratory of Transient Optics and Photonics, Xi'an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi'an, 710119, Shaanxi
来源：
Zhongguo Jiguang/Chinese Journal of Lasers | 2014年 / 41卷 / 10期
关键词：
Assisted gas pressure; Femtosecond laser; Laser fluence; Micro-hole drilling; TiC ceramic; Ultrafast optics;
D O I：
10.3788/CJL201441.1003010
中图分类号：
学科分类号：
摘要：
Drilling micro-holes in TiC ceramic with femtosecond laser in different laser fluence and assisted gas pressure has been demonstrated. Scanning electron microscope (SEM), micrometer X-ray 3D imaging system (Micro-CT) and X-ray photoelectron spectroscopy (XPS) are used to investigate the morphology and chemical bonds of micro-holes. The results show that the circularities of micro-holes at the entry are not less than 99% when the laser fluence varies. The circularities of micro-holes at the exit increase as the laser fluence grows, then it tend to be stable. The maximum value of the circularity at the exit is 95%. The taper of micro-holes increases with the assisted gas pressure. When the laser fluence is 0.51 J/mm2, the taper of micro-holes drilled with 0.3 MPa gas pressure is the best, its long axis taper is -0.13° and the short axis taper is 0.77°. C-C bonds and Ti-C bonds rupture while debris which contains metal Ti, Ti2O3 and TiO2 forms around the micro-holes during laser drilling. Lastly, the mechanism of interactions between laser beam and materials is discussed.
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页数：7
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