Magnetron sputtering behavior of Sn-doped In2O3 ceramic target

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作者：
机构：
[1] Hou, Junfeng
[2] Zhou, Kechao
[3] Li, Zhiyou
[4] Gan, Xueping
[5] Sun, Benshuang
[6] Jiang, He
来源：
Hou, Junfeng | 1600年 / American Scientific Publishers卷 / 09期
关键词：
Magnetron sputtering;
D O I：
10.1166/jamr.2014.1216
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