A large area and low loss thin-film terahertz polarizer

被引：0

作者：

Mao, Hong-Yan ^{[1
,2
]}

Xu, Hong-Mei ^{[1
]}

Xia, Liang-Ping ^{[2
]}

Wang, Si-Jiang ^{[2
]}

Rao, Xian-Hua ^{[2
]}

Li, Wei ^{[1
,2
]}

Shen, Jun ^{[2
]}

Wei, Dong-Shan ^{[2
]}

Zhao, Guo-Zhong ^{[3
]}

Cui, Hong-Liang ^{[2
]}

Du, Chun-Lei ^{[2
]}

机构：

[1] International Research Centre for Nano Handling and Manufacturing of China (CNM), College of Electronical and Information Engineering, Changchun University of Science and Technology, Changchun

[2] Key Laboratory of Multi-scale Manufacturing Technology, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing

[3] Key Laboratory of Terahertz Optoelectronics, Department of Physics, Capital Normal University, Beijing

来源：

Guangzi Xuebao/Acta Photonica Sinica | 2015年 / 44卷 / 09期

基金：

中国国家自然科学基金;

关键词：

Gratings; Large area; Lithography; Polarization; Polarizers; Polymer films; Terahertz waves;

D O I：

10.3788/gzxb20154409.0923004

中图分类号：

学科分类号：

摘要：

Polymer membrane with quality control on the silicon surface was synthesised, where the hard silicon was used as supportive substrate. The periodically metallic structures were patterned on the polymer film surface by normal photolithography. Finally, polymer film is peeled off from supportive silicon substrate. A large area and high uniformity of micro structures thin-film terahertz device has been obtained. A terahertz polarizer on polymide film substrate was fabricated using this method. Experimental results show that the polarization extinction ratio is more than 50 dB at 0.1 THz. The average transmittance reaches 89.78% in the polarization direction at the range of 0.1-2 THz. The degree of polarization is over 99.84%. The polarization uniformity of the polarizer is fine around the diameter region of 42.3 mm. So, the flexible terahertz polarizer fabricated here is satisfied with practical demand. ©, 2015, Chinese Optical Society. All right reserved.

引用

页数：5

共 16 条

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