Codeposition of Cu/Ni thin films from mixed precursors in supercritical carbon dioxide solutions

被引:0
|
作者
Rasadujjaman, Md [1 ]
Watanabe, Mitsuhiro [1 ]
Kondoh, Eiichi [1 ]
机构
[1] Interdisciplinary Graduate School of Medicine and Engineering, University of Yamanashi, Kofu 400-8511, Japan
关键词
Alloy deposition - Codeposition - In-situ X-ray diffraction - Mixed precursors - Ni thin films - Supercritical carbon dioxides - Supercritical CO2 - Supercritical medium;
D O I
05GA07
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
  • [1] Codeposition of Cu/Ni thin films from mixed precursors in supercritical carbon dioxide solutions
    Rasadujjaman, Md
    Watanabe, Mitsuhiro
    Kondoh, Eiichi
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2014, 53 (05)
  • [2] Deposition of Cu thin films from supercritical carbon dioxide using hexafluoroacetylacetnatecopper
    Kondoh, E
    Shigama, K
    THIN SOLID FILMS, 2005, 491 (1-2) : 228 - 234
  • [3] Supercritical carbon dioxide etching of transition metal (Cu, Ni, Co, Fe) thin films
    Rasadujjaman, Md
    Nakamura, Yoshiki
    Watanabe, Mitsuhiro
    Kondoh, Eiichi
    Baklanov, Mikhail R.
    MICROELECTRONIC ENGINEERING, 2016, 153 : 5 - 10
  • [4] Deposition of zinc oxide thin films in supercritical carbon dioxide solutions
    Kondoh, Eiichi
    Sasaki, Kenji
    Nabetani, Yoichi
    APPLIED PHYSICS EXPRESS, 2008, 1 (06) : 0612011 - 0612013
  • [5] Kinetics of Deposition of Cu Thin Films in Supercritical Carbon Dioxide Solutions from a F-Free Copper(II) β-Diketone Complex
    Matsubara, Masahiro
    Hirose, Michiru
    Tamai, Kakeru
    Shimogaki, Yukihiro
    Kondoh, Eiichi
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2009, 156 (06) : H443 - H447
  • [6] Deposition of ru thin films from supercritical carbon dioxide fluids
    Kondoh, E
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2005, 44 (7B): : 5799 - 5802
  • [7] Metalizable polymer thin films in supercritical carbon dioxide
    Koga, Tadanori
    Jerome, J.L.
    Rafailovich, M.H.
    Sokolov, J.C.
    Gordon, C.
    Journal of Adhesion, 1600, 81 (7-8): : 751 - 764
  • [8] Metalizable polymer thin films in supercritical carbon dioxide
    Koga, T
    Jerome, JL
    Rafailovich, MH
    Sokolov, JC
    Gordon, C
    JOURNAL OF ADHESION, 2005, 81 (7-8): : 751 - 764
  • [9] Dynamics of polymer thin films in supercritical carbon dioxide
    Koga, T
    Seo, YS
    Hu, X
    Shin, K
    Zhang, Y
    Rafailovich, MH
    Sokolov, JC
    Chu, B
    Satija, SK
    EUROPHYSICS LETTERS, 2002, 60 (04): : 559 - 565
  • [10] Thin fluoropolymer films and nanoparticle coatings from the rapid expansion of supercritical carbon dioxide solutions with electrostatic collection
    Fulton, JL
    Deverman, GS
    Yonker, CR
    Grate, JW
    De Young, J
    McClain, JB
    POLYMER, 2003, 44 (13) : 3627 - 3632