Development of high-precision micro-coordinate measuring machine: Multi-probe measurement system for measuring yaw and straightness motion error of XY linear stage

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Department of Precision Engineering, University of Tokyo, Hongo 7-3-1, Bunkyo-ku, Tokyo 113-8656, Japan [1 ]
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Precis Eng | / 3卷 / 424-430期
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Coordinate measuring machines
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