Compressively strained epitaxial Ge layers for quantum computing applications

被引：0

作者：

Shimura, Yosuke ^{[1
]}

Godfrin, Clement ^{[1
]}

Hikavyy, Andriy ^{[1
]}

Li, Roy ^{[1
]}

Aguilera, Juan ^{[2
]}

Katsaros, Georgios ^{[2
]}

Favia, Paola ^{[1
]}

Han, Han ^{[1
]}

Wan, Danny ^{[1
]}

De Greve, Kristiaan ^{[1
,3
]}

Loo, Roger ^{[1
,4
]}

机构：

[1] imec, Kapeldreef 75, Leuven,3001, Belgium

[2] Institute of Science and Technology Austria, Am Campus 1, Klosterneuburg,A-3400, Austria

[3] KU Leuven, Micro and Nano Systems, Kasteelpark Arenberg 10, Leuven,3001, Belgium

[4] Ghent University, Department of Solid-State Sciences, Krijgslaan 281, Building S1, Ghent,9000, Belgium

来源：

Materials Science in Semiconductor Processing | 2024年 / 174卷

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D O I：

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摘要：

引用

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