Compressively strained epitaxial Ge layers for quantum computing applications

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作者：
Shimura, Yosuke [1 ]
Godfrin, Clement [1 ]
Hikavyy, Andriy [1 ]
Li, Roy [1 ]
Aguilera, Juan [2 ]
Katsaros, Georgios [2 ]
Favia, Paola [1 ]
Han, Han [1 ]
Wan, Danny [1 ]
De Greve, Kristiaan [1 ,3 ]
Loo, Roger [1 ,4 ]
机构：
[1] imec, Kapeldreef 75, Leuven,3001, Belgium
[2] Institute of Science and Technology Austria, Am Campus 1, Klosterneuburg,A-3400, Austria
[3] KU Leuven, Micro and Nano Systems, Kasteelpark Arenberg 10, Leuven,3001, Belgium
[4] Ghent University, Department of Solid-State Sciences, Krijgslaan 281, Building S1, Ghent,9000, Belgium
来源：
Materials Science in Semiconductor Processing | 2024年 / 174卷
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