Chemical structural analysis of diamondlike carbon films with different electrical resistivities by X-ray photoelectron spectroscopy

被引：0
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作者：
Takabayashi, Susumu [1 ]
Okamoto, Keishi [1 ,2 ]
Shimada, Kenya [3 ]
Motomitsu, Kunihiko [1 ]
Motoyama, Hiroaki [1 ]
Nakatani, Tatsuyuki [2 ]
Sakaue, Hiroyuki [1 ]
Suzuki, Hitoshi [1 ]
Takahagi, Takayuki [1 ]
机构：
[1] Department of Quantum Matter, Graduate School of Advanced Sciences of Matter, Hiroshima University, 1-3-1 Kagamiyama Higashihiroshima, Hiroshima 739-8530, Japan
[2] Toyo Advanced Technologies Co. Ltd., 5-3-38 Ujina-Higashi, Minami-ku, Hiroshima 734-8501, Japan
[3] Hiroshima Synchrotron Radiation Center, Hiroshima University, 2-313 Kagamiyama, Higashihiroshima, Hiroshima 739-0046, Japan
来源：
| 1600年 / Japan Society of Applied Physics卷 / 47期
关键词：
X ray photoelectron spectroscopy;
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摘要：
Journal article (JA)
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