Chemical structural analysis of diamondlike carbon films with different electrical resistivities by X-ray photoelectron spectroscopy

被引：0

作者：

Takabayashi, Susumu ^{[1
]}

Okamoto, Keishi ^{[1
,2
]}

Shimada, Kenya ^{[3
]}

Motomitsu, Kunihiko ^{[1
]}

Motoyama, Hiroaki ^{[1
]}

Nakatani, Tatsuyuki ^{[2
]}

Sakaue, Hiroyuki ^{[1
]}

Suzuki, Hitoshi ^{[1
]}

Takahagi, Takayuki ^{[1
]}

机构：

[1] Department of Quantum Matter, Graduate School of Advanced Sciences of Matter, Hiroshima University, 1-3-1 Kagamiyama Higashihiroshima, Hiroshima 739-8530, Japan

[2] Toyo Advanced Technologies Co. Ltd., 5-3-38 Ujina-Higashi, Minami-ku, Hiroshima 734-8501, Japan

[3] Hiroshima Synchrotron Radiation Center, Hiroshima University, 2-313 Kagamiyama, Higashihiroshima, Hiroshima 739-0046, Japan

来源：

| 1600年 / Japan Society of Applied Physics卷 / 47期

关键词：

X ray photoelectron spectroscopy;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Journal article (JA)

引用