Evolution of erbium lattice locations in silicon: Effects of thermal annealing and codoped impurities (carbon, nitrogen, oxygen, and fluorine)

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作者：
Ren, X.T. [1 ,2 ]
Huang, M.B. [1 ]
机构：
[1] Department of Physics, University at Albany, State University of New York, Albany, NY 12222
[2] Institute of Heavy Ion Physics, Peking University, China
来源：
Journal of Applied Physics | 2006年 / 100卷 / 02期
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