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- [2] Bulk acoustic wave analysis of crystalline-plane-oriented aluminum nitride films JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2007, 46 (10A): : 6719 - 6726
- [6] Pure shear bulk acoustic wave of the oriented AIN 2007 SIXTEENTH IEEE INTERNATIONAL SYMPOSIUM ON THE APPLICATIONS OF FERROELECTRICS, VOLS 1 AND 2, 2007, : 743 - +
- [7] Preparation and piezoelectric properties analysis of ZnO films for film bulk acoustic resonator Prof. (bhyang@tjut.edu.cn), 1600, Board of Optronics Lasers, No. 47 Yang-Liu-Qing Ying-Jian Road, Tian-Jin City, 300380, China (24):
- [10] Electrode optimization for bulk acoustic wave resonators based on ZnO MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS, 2010, 174 (1-3): : 50 - 54