In-plane rotary comb-drive actuator for a variable optical attenuator

被引：22

作者：

Hou, Max Ti-Kuang ^{[1
]}

Huang, Jing-Yi ^{[2
]}

Jiang, Shiue-Shr ^{[2
]}

Yeh, J. Andrew ^{[2
]}

机构：

[1] National United University, Department of Mechanical Engineering, Miaoli 36003, 1, Lienda

[2] National Tsing Hua University, Institute of Nanoengineering and Microsystems, Hsinchu 30013, 101, Kuang-Fu Road

来源：

Journal of Micro/Nanolithography, MEMS, and MOEMS | 2008年 / 7卷 / 04期

关键词：

Electrostatic actuation; Microelectromechanical systems (MEMS); Rotary comb drive; Variable optical attenuator (VOA);

D O I：

10.1117/1.3013547

中图分类号：

学科分类号：

摘要：

An in-plane rotary comb drive actuator was designed for variable optical attenuators (VOAs) that achieved large attenuation with fast response at low driving voltage. Actuator performance was improved by using a higher density of comb fingers for a smaller moment of inertia, serpentine flexure springs for a larger rotational angle, and symmetric spring arrangement for a higher radial shock resistance. A rotation of a tilted reflective mirror was used to further enhance the optical attenuation of VOA. The actuator, proposed with the size of 2 mm×2 mm, achieved the bandwidth of 350 Hz and the deflection angle of 2.5 deg at 5 V, resulting in the maximum attenuation of 57 dB. © 2008 Society of Photo-Optical Instrumentation Engineers.

引用

共 20 条

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