Study on simulation of silicon anisotropic etching using cellular automata method

被引:0
|
作者
Key Laboratory of MEMS, Southeast University, Nanjing 210096, China [1 ]
不详 [2 ]
机构
来源
Guti Dianzixue Yanjiu Yu Jinzhan | 2006年 / 1卷 / 128-133期
关键词
11;
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
  • [1] Step flow model in continuous cellular automata method for simulation of anisotropic etching of silicon
    Rezvankhah, Mohamad Amin
    Shayan, Mohsen
    Merati, Amir Reza
    Pahlevani, Mohsen
    JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 2013, 12 (02):
  • [2] SIMULATION OF ANISOTROPIC CHEMICAL ETCHING OF CRYSTALLINE SILICON USING A CELLULAR-AUTOMATA MODEL
    THAN, O
    BUTTGENBACH, S
    SENSORS AND ACTUATORS A-PHYSICAL, 1994, 45 (01) : 85 - 89
  • [3] Simulation of anisotropic crystalline etching using a continuous Cellular Automata algorithm
    Zhu, ZJ
    Liu, C
    CMES-COMPUTER MODELING IN ENGINEERING & SCIENCES, 2000, 1 (01): : 11 - 19
  • [4] Study on 3-D continuous cellular automata(CA) model for silicon anisotropic etching -simulation
    Key Laboratory of MEMS of MOE, Southeast University, Nanjing 210096, China
    不详
    Yi Qi Yi Biao Xue Bao, 2006, 6 (551-555):
  • [5] Efficient process development for bulk silicon etching using cellular automata simulation techniques
    Marchetti, J
    He, Y
    Than, O
    Akkaraju, S
    MICROMACHINED DEVICES AND COMPONENTS IV, 1998, 3514 : 287 - 295
  • [6] ASECA: A cellular-automata simulation program tor a silicon anisotropic super-micro-etching process in aqueous KOH
    Nishidate, K
    Baba, M
    Gaylord, RJ
    COMPUTERS IN PHYSICS, 1998, 12 (01): : 88 - 93
  • [7] A cellular automata simulation of atomic layer etching
    Strotmann, Jan
    Chopra, Meghali
    Bonnecaze, Roger T.
    ADVANCED ETCH TECHNOLOGY FOR NANOPATTERNING VII, 2018, 10589
  • [8] 3-D photoresist etching simulation using cellular automata
    Zhou, ZF
    Huang, QA
    Li, WH
    Da, FP
    Shen, HP
    ICO20: OPTICAL DESIGN AND FABRICATION, 2006, 6034
  • [9] Silicon anisotropic wet etching simulation using molecular dynamics
    Kakinaga, T
    Hatai, A
    Tabata, O
    Isono, Y
    Transducers '05, Digest of Technical Papers, Vols 1 and 2, 2005, : 816 - 819
  • [10] A 3-D Simulator for Silicon Anisotropic Wet Chemical Etching Process Based on Cellular Automata
    Zhou, Zai-Fa
    Huang, Qing-An
    Li, Wei-Hua
    Zhu, Chi
    INTERNATIONAL MEMS CONFERENCE 2006, 2006, 34 : 674 - 679