Silicon based optical waveguides chemical sensors

被引：0
作者：
Wu, Yuanda [1 ]
An, Junming [1 ]
Li, Jianguang [1 ]
Wang, Yue [1 ]
Yin, Xiaojie [1 ]
Zhang, Jiashun [1 ]
Wang, Hongjie [1 ]
Hu, Xiongwei [1 ]
机构：
[1] Research and Development Center for Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences
来源：
Guangxue Xuebao/Acta Optica Sinica | 2009年 / 29卷 / 07期
关键词：
Evanescent field; Mach-Zehnder interferometer (MZI); Optical waveguide sensors; Phase difference; Refractive index;
D O I：
10.3788/AOS20092907.1983
中图分类号：
学科分类号：
摘要：
The theoretical design, fabrication and characterisation of integrated optical phase-modulated Mach-Zehnder Interferometer (MZI) chemical sensing platform are presented. The sensor system, based on silica waveguide materials, is fabricated with 'silicon microelectronics technology'. The optical waveguides are designed to mono-mode behaviour and high surface sensitivity. These sensor show a effective refractive index detection limit of 10-7. When the sensing waveguide is chemically modified, the sensing platform will show high sensitivity to opto-chemical reaction.. Finally, the refractive index resolution and sensing properties are simulated and analyzed, also, the coming key problems are discussed.
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页码：1983 / 1986
页数：3
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