Preparation of ZrO2/SiO2 antireflective hard coating from sol-gel processing

被引：0

作者：

Li, Haiyuan ^{[1
]}

Tang, Yongxing ^{[1
]}

Hu, Lili ^{[1
]}

机构：

[1] Joint Laboratory for High Power Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences

来源：

Guangxue Xuebao/Acta Optica Sinica | 2009年 / 29卷 / 02期

关键词：

Coating; Scratch-resistant; Sol-gel; Thin film optics; Two-layer antireflective; ZrO[!sub]2[!/sub]/SiO[!sub]2[!/sub;

D O I：

10.3788/AOS20092902.0556

中图分类号：

学科分类号：

摘要：

A type of quarter-wavelength two-layer antireflective hard coating has been developed by sol-gel dipping method with zirconium n-propoxide [Zr(OPr)4] and tetraethoxysilane (TEOS) as precursors. The coating possesses smooth and even surface, its root-mean-square rouhness is 1.038 nm and the average roughness is 0.812 nm. For the silica glass substrate with two sides coated with the above coating, the transmittance at 351 nm, the third harmonic of 1053 nm, is 99.41%, which is improved by 6.14% than that of the uncoated material. For the double-side-coated K9 substrate, the transmittance at 1053 nm is about 99.63%, which is improved by 7.67%. The laser damage threshold of the coating is 16.8 J/cm2, for 1053 nm wavelength and 1 ns pulse width. The coating has well antireflective and scratch-resistant performance, as well as high damage threshold.

引用

页码：556 / 559

页数：3

共 13 条

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