Growth of indium tin oxides films by magnetron sputtering

被引：0
|
作者：
Chang, Tianhai [1 ]
Sun, Kai [2 ]
机构：
[1] College of Electronic and Commun. Eng., South China Univ. of Technol., Guangzhou 510640, China
[2] Shanghai Shu-Guang Machinery Works and Corp, Shanghai 200127, China
来源：
Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology | 2009年 / 29卷 / 03期
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页码：324 / 327
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