Synergistic Contribution of Surface Plasmon and Passivation to High-Performance Solar-Blind UV Optical-Communication Sensor

被引:1
作者
Shu, Lin-Cong [1 ]
Sha, Shu-Lin [2 ]
Yan, Si-Han [1 ]
Li, Shan [1 ]
Ji, Xue-Qiang [1 ]
Zhang, Jia-Han [3 ]
Jiang, Ming-Ming [2 ]
Tang, Wei-Hua [1 ]
Liu, Zeng [3 ]
机构
[1] Nanjing Univ Posts & Telecommun, Coll Integrated Circuit Sci & Engn, Innovat Ctr Gallium Oxide Semicond IC GAO, Nanjing 210023, Peoples R China
[2] Nanjing Univ Aeronaut & Astronaut, Coll Phys, MIIT Key Lab Aerosp Informat Mat & Phys, Nanjing 211106, Peoples R China
[3] Inner Mongolia Univ, Sch Elect Informat Engn, Inner Mongolia Key Labora tory Intelligent Commun, Hohhot 010021, Peoples R China
基金
中国国家自然科学基金;
关键词
Optical sensors; Optical films; Optical device fabrication; Absorption; Optical imaging; Photodetectors; Photonic band gap; Surface plasmons; Nanoparticles; Optical diffraction; Ag-nanoparticles; indium (In)-doped Ga(2)o(3); MgO; solar-blind sensing; surface plasmon; NANOSPHERE LITHOGRAPHY; RESONANCE-SPECTRUM; RESPONSIVITY; SPECTROSCOPY; SUBSTRATE;
D O I
10.1109/TED.2024.3478171
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
With the incorporation of indium (In), the surface energy band of (In0.25Ga0.75)(2)O-3 (InGaO) bends upward, leading to mitigating electron loss. The thin MgO layer optimizes optical performance and improves resonance quality factor by reducing losses. Here, Ag nanoparticles (AgNPs) coated by a 10-nm thick MgO layer were fabricated on on(3)InGaO films. By localized surface plasmon resonance (LSPR) effect of AgNPs, the enhanced optical properties of MgO, and high-k dielectric passivation, a high-performance solar-blind photodetector was achieved. This photodetector demonstrated high responsivity (R), detectivity ( D*), and external quantum efficiency (EQE) of 2438.8 mA/W, 2.4 x 10 (14) Jones, and 1193.6%, respectively, significantly improving the detection performance of the InGaO thin films fabricated by plasma enhanced chemical vapor deposition (PECVD). In addition, the InGaO@AgNPs/MgO is integrated into optical communication systems as a signal receiver and implements ASCII communication with minimal power consumption and weak light intensity. This work presents a straightforward and efficient method for significantly enhancing the performance of detectors, facilitating their applications in the fields of the Internet of Things (IoT) and optical sensing.
引用
收藏
页码:7747 / 7751
页数:5
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