Summary of algorithms for white-light scanning interferometry

被引:0
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作者
Yang, Tian-Bo [1 ]
Guo, Hong [1 ]
Li, Da-Cheng [1 ]
机构
[1] State Key Laboratory Precision Measurement Technology and Instrument, Tsinghua University, Beijing 100084, China
来源
Guangxue Jishu/Optical Technique | 2006年 / 32卷 / 01期
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页码:115 / 117
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