Application of two-dimensional polystyrene arrays in the fabrication of ordered silicon pillars

被引：0
|
作者：
Zhang, Y.J. [1 ,2 ]
Li, W. [2 ]
Chen, K.J. [2 ]
机构：
[1] Institute of Solid State Physics, JiLin Normal University, SiPing, JiLin 136000, China
[2] National Laboratory of Solid State Microstructures, Department of Physics, Nanjing University, Nanjing, 210093, China
来源：
Journal of Alloys and Compounds | 1600年 / 450卷 / 1-2期
关键词：
2D ordered Si-based pillars were fabricated by nanosphere lithography. Polystyrene nanosphere monolayer was deposited onto the silicon substrate by the self-organization technique; which was used as mask in the following RIE process. The polystyrene nanospheres were thinned by oxygen plasma; and thus the radius of silicon pillars can be controlled. © 2006 Elsevier B.V. All rights reserved;
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页码：512 / 516
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