Application of two-dimensional polystyrene arrays in the fabrication of ordered silicon pillars

被引：0
|
作者：
Zhang, Y.J. [1 ,2 ]
Li, W. [2 ]
Chen, K.J. [2 ]
机构：
[1] Institute of Solid State Physics, JiLin Normal University, SiPing, JiLin 136000, China
[2] National Laboratory of Solid State Microstructures, Department of Physics, Nanjing University, Nanjing, 210093, China
来源：
Journal of Alloys and Compounds | 1600年 / 450卷 / 1-2期
关键词：
2D ordered Si-based pillars were fabricated by nanosphere lithography. Polystyrene nanosphere monolayer was deposited onto the silicon substrate by the self-organization technique; which was used as mask in the following RIE process. The polystyrene nanospheres were thinned by oxygen plasma; and thus the radius of silicon pillars can be controlled. © 2006 Elsevier B.V. All rights reserved;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Journal article (JA)
引用
收藏
页码：512 / 516
相关论文
共 50 条
  • [21] Fabrication of the two-dimensional ordered magnetic nanolattices.
    Bozhko, SI
    Naumenko, IG
    Samarov, EN
    Masalov, VM
    Emelchenko, GA
    Ionov, AM
    Fokin, DA
    ASDAM 2004: The Fifth International Conference on Advanced Semiconductor Devices and Microsystems, 2004, : 87 - 89
  • [22] Fabrication of two-dimensional periodic relief grating of tethered polystyrene on silicon surface as solvent sensors
    Huang, Hui Ling
    Chen, Jem-Kun
    Houng, Mau Phon
    SENSORS AND ACTUATORS B-CHEMICAL, 2013, 177 : 833 - 840
  • [23] Fabrication and optical properties of two-dimensional photonic crystals of CdSe pillars
    Chuang, LM
    Fu, HK
    Chen, YF
    APPLIED PHYSICS LETTERS, 2005, 86 (06) : 1 - 3
  • [24] Fabrication and optical properties of two-dimensional photonic crystal of ZnO pillars
    Wu, Wei
    Yu, Ke
    Mao, Huibing
    Zhang, Zhengli
    Zhu, Zigiang
    CRYSTAL RESEARCH AND TECHNOLOGY, 2010, 45 (04) : 393 - 397
  • [25] Ordered arrays of silicon pillars with controlled height and aspect ratio
    Sinitskii, Alexander
    Neumeier, Stefan
    Nelles, Juergen
    Fischler, Monika
    Simon, Ulrich
    NANOTECHNOLOGY, 2007, 18 (30)
  • [26] Fabrication of two-dimensional arrays of microlenses and their applications in photolithography
    Wu, MH
    Whitesides, GM
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2002, 12 (06) : 747 - 758
  • [27] Fabrication of two-dimensional crystalline arrays of protein molecules
    Nagayama, K
    MOLECULAR MANUFACTURING, 1996, 2 : 53 - 65
  • [28] Design and fabrication of two-dimensional superconducting bolometer arrays
    Benford, DJ
    Voellmer, GM
    Chervenak, JA
    Kent, DB
    Moseley, SH
    Shafer, RA
    Staguhn, JG
    Stacey, GJ
    MILLIMETER AND SUBMILLIMETER DETECTORS FOR ASTRONOMY, 2003, 4855 : 552 - 562
  • [29] Design and fabrication of two-dimensional superconducting bolometer arrays
    Benford, DJ
    Staguhn, JG
    Stacey, GJ
    Page, LA
    Moseley, SH
    Irwin, KD
    Chervenak, JA
    Allen, CA
    MILLIMETER AND SUBMILLIMETER DETECTORS FOR ASTRONOMY II, 2004, 5498 : 647 - 658
  • [30] Preparation and characterization of two-dimensional ordered arrays of metallic nanoparticles
    Kandulski, W
    Kosiorek, A
    Rybczynski, J
    Bauman, D
    Giersig, M
    ACTA PHYSICA POLONICA A, 2003, 104 (05) : 495 - 502
12345