Sub-Nanometer Positioning Combining New Linear Motor with Linear Motion Ball Guide Ways

被引：0

作者：

Department of Mechanical Engineering, Faculty of Science and Technology, Shizuoka Institute of Science and Technology, 2200-2 Toyosawa, Shizuoka, Fukuroi ^{[1
]}

437-8555, Japan

不详 ^{[2
]}

471-8525, Japan

不详 ^{[3
]}

437-8555, Japan

机构：

[1] Department of Mechanical Engineering, Faculty of Science and Technology, Shizuoka Institute of Science and Technology, 2200-2 Toyosawa, Shizuoka, Fukuroi

[2] Department of Mechanical Engineering, Toyota National College of Technology, 2-1 Eisei, Aichi, Toyota

[3] Shizuoka Institute of Science and Technology, 2200-2 Toyosawa, Shizuoka, Fukuroi

来源：

Int. J. Autom. Technol. | 2009年 / 3卷 / 241-248期

基金：

日本科学技术振兴机构;

关键词：

linear motion ball guide way; linear motor; positioning accuracy; step response; sub-nanometer positioning;

D O I：

10.20965/ijat.2009.p0241

中图分类号：

学科分类号：

摘要：

A new type of linear motor described in this paper has some advantages compared with the usual types of motors. The attractive magnetic force between the stator (permanent magnets) and mover (armature) is diminished almost to zero. The efficiency is better because the magnetic flux leakage is very small, the size of motor is smaller and detent (force ripple) is smaller than the general motors. Therefore, we think that this motor is greatly suitable for ultra-precision positioning as an actuator. An ultra-precision positioning device using this motor and liner motion ball guide ways is newly developed. Moreover, the positioning performance is evaluated by a positioning resolution, devi-ational and dispersion errors. As the results of re-peated step response tests, the positioning resolution is 0.3 nm, the deviational error is –0.001nm and the dispersion error (3σ) is 0.29 nm. Consequently, the positioning device achieves sub-nanometer positioning. In addition, very large rigidity can be achieved. © Fuji Technology Press Ltd.

引用

页码：241 / 248

页数：7