1D Crystallographic Etching of Few-Layer WS2

被引:0
作者
Li, Shisheng [1 ,11 ]
Lin, Yung-Chang [2 ,3 ]
Chiew, Yiling [3 ]
Dai, Yunyun [4 ]
Ning, Zixuan [4 ]
Zhang, Yaming [5 ]
Nakajima, Hideaki [6 ]
Lim, Hong En [7 ]
Wu, Jing [8 ]
Neitoh, Yasuhisa [9 ]
Okazaki, Toshiya [6 ]
Sun, Yang [5 ]
Sun, Zhipei [4 ]
Suenaga, Kazu [2 ,3 ]
Sakuma, Yoshiki [10 ]
Tsukagoshi, Kazuhito [1 ]
Taniguchi, Takaaki [1 ]
机构
[1] Natl Inst Mat Sci NIMS, Res Ctr Mat Nanoarchitecton MANA, Tsukuba 3050044, Japan
[2] Natl Inst Adv Ind Sci & Technol, Nanomat Res Inst, AIST Cent 5, Tsukuba 3058565, Japan
[3] Osaka Univ, Inst Sci & Ind Res ISIR SANKEN, Osaka 5670047, Japan
[4] Aalto Univ, QTF Ctr Excellence, Dept Elect & Nanoengn, Espoo 02150, Finland
[5] Sun Yat Sen Univ, Sch Mat, Shenzhen Campus, Shenzhen 518107, Peoples R China
[6] Natl Inst Adv Ind Sci & Technol, Nano Carbon Device Res Ctr, AIST Cent 5, Tsukuba, 3058565, Japan
[7] Saitama Univ, Grad Sch Sci & Engn, Dept Chem, Saitama 3388570, Japan
[8] Agcy Sci Tech & Res A STAR, Inst Mat Res & Engn IMRE, 2 Fusionopolis Way, Singapore 138634, Singapore
[9] Natl Inst Adv Ind Sci & Technol, Nanosyst Res Inst, Tsukuba 3058560, Japan
[10] Natl Inst Mat Sci NIMS, Res Ctr Elect & Opt Mat, Tsukuba 3050044, Japan
[11] Southeast Univ, Sch Phys, Nanjing 211189, Peoples R China
关键词
1D nanotrenches; etching; photoluminescence; second harmonic generation; transition metal dichalcogenides; EFFICIENT; GROWTH;
D O I
10.1002/adfm.202405665
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Layer number-dependent band structures and symmetry are vital for the electrical and optical characteristics of 2D transition metal dichalcogenides (TMDCs). Harvesting 2D TMDCs with tunable thickness and properties can be achieved through top-down etching and bottom-up growth strategies. In this study, a pioneering technique that utilizes the migration of in situ generated Na-W-S-O droplets to etch out 1D nanotrenches in few-layer WS2 is reported. 1D WS2 nanotrenches are successfully fabricated on the optically inert bilayer WS2, showing pronounced photoluminescence and second harmonic generation signals. Additionally, the modulation of inkjet-printed Na2WO4-Na2SO4 particles to switch between the etching and growth modes by manipulating the sulfur supply is demonstrated. This versatile approach enables the creation of 1D nanochannels on 2D TMDCs. The research presents exciting prospects for the top-down and bottom-up fabrication of 1D-2D mixed-dimensional TMDC nanostructures, expanding their use for electronic and optoelectronic applications.
引用
收藏
页数:10
相关论文
共 43 条
  • [11] Etching Techniques in 2D Materials
    He, Ting
    Wang, Zhen
    Zhong, Fang
    Fang, Hehai
    Wang, Peng
    Hu, Weida
    [J]. ADVANCED MATERIALS TECHNOLOGIES, 2019, 4 (08)
  • [12] Wafer-scale monolithic integration of full-colour micro-LED display using MoS2 transistor
    Hwangbo, Sumin
    Hu, Luhing
    Anh Tuan Hoang
    Choi, Jae Yong
    Ahn, Jong-Hyun
    [J]. NATURE NANOTECHNOLOGY, 2022, 17 (05) : 500 - +
  • [13] Fabrication Technologies for the On-Chip Integration of 2D Materials
    Jia, Linnan
    Wu, Jiayang
    Zhang, Yuning
    Qu, Yang
    Jia, Baohua
    Chen, Zhigang
    Moss, David J.
    [J]. SMALL METHODS, 2022, 6 (03):
  • [14] Na2SO4-Regulated High-Quality Growth of Transition Metal Dichalcogenides by Controlling Diffusion
    Jin, Yuanyuan
    Cheng, Miao
    Liu, Hang
    Ouzounian, Miray
    Hu, Travis Shihao
    You, Bingying
    Shao, Gonglei
    Liu, Xiao
    Liu, Yeru
    Li, Huimin
    Li, Shisheng
    Guan, Jie
    Liu, Song
    [J]. CHEMISTRY OF MATERIALS, 2020, 32 (13) : 5616 - 5625
  • [15] Atomic Layer Etching Mechanism of MoS2 for Nanodevices
    Kim, Ki Seok
    Kim, Ki Hyun
    Nam, Yeonsig
    Jeon, Jaeho
    Yim, Soonmin
    Singh, Eric
    Lee, Jin Yong
    Lee, Sung Joo
    Jung, Yeon Sik
    Yeom, Geun Young
    Kim, Dong Woo
    [J]. ACS APPLIED MATERIALS & INTERFACES, 2017, 9 (13) : 11967 - 11976
  • [16] Optical Patterning of Two-Dimensional Materials
    Kollipara, Pavana Siddhartha
    Li, Jingang
    Zheng, Yuebing
    [J]. RESEARCH, 2020, 2020
  • [17] Catalytic creation of channels in the surface layers of highly oriented pyrolytic graphite by cobalt nanoparticles
    Konishi, S.
    Sugimoto, W.
    Murakami, Y.
    Takasu, Y.
    [J]. CARBON, 2006, 44 (11) : 2338 - 2340
  • [18] Rapid and Reliable Thickness Identification of Two-Dimensional Nanosheets Using Optical Microscopy
    Li, Hai
    Wu, Jumiati
    Huang, Xiao
    Lu, Gang
    Yang, Jian
    Lu, Xin
    Zhang, Qihua
    Zhang, Hua
    [J]. ACS NANO, 2013, 7 (11) : 10344 - 10353
  • [19] General synthesis of two-dimensional van der Waals heterostructure arrays
    Li, Jia
    Yang, Xiangdong
    Liu, Yang
    Huang, Bolong
    Wu, Ruixia
    Zhang, Zhengwei
    Zhao, Bei
    Ma, Huifang
    Dang, Weiqi
    Wei, Zheng
    Wang, Kai
    Lin, Zhaoyang
    Yan, Xingxu
    Sun, Mingzi
    Li, Bo
    Pan, Xiaoqing
    Luo, Jun
    Zhang, Guangyu
    Liu, Yuan
    Huang, Yu
    Duan, Xidong
    Duan, Xiangfeng
    [J]. NATURE, 2020, 579 (7799) : 368 - +
  • [20] Large-scale flexible and transparent electronics based on monolayer molybdenum disulfide field-effect transistors
    Li, Na
    Wang, Qinqin
    Shen, Cheng
    Wei, Zheng
    Yu, Hua
    Zhao, Jing
    Lu, Xiaobo
    Wang, Guole
    He, Congli
    Xie, Li
    Zhu, Jianqi
    Du, Luojun
    Yang, Rong
    Shi, Dongxia
    Zhang, Guangyu
    [J]. NATURE ELECTRONICS, 2020, 3 (11) : 711 - 717