1D Crystallographic Etching of Few-Layer WS2

被引:0
作者
Li, Shisheng [1 ,11 ]
Lin, Yung-Chang [2 ,3 ]
Chiew, Yiling [3 ]
Dai, Yunyun [4 ]
Ning, Zixuan [4 ]
Zhang, Yaming [5 ]
Nakajima, Hideaki [6 ]
Lim, Hong En [7 ]
Wu, Jing [8 ]
Neitoh, Yasuhisa [9 ]
Okazaki, Toshiya [6 ]
Sun, Yang [5 ]
Sun, Zhipei [4 ]
Suenaga, Kazu [2 ,3 ]
Sakuma, Yoshiki [10 ]
Tsukagoshi, Kazuhito [1 ]
Taniguchi, Takaaki [1 ]
机构
[1] Natl Inst Mat Sci NIMS, Res Ctr Mat Nanoarchitecton MANA, Tsukuba 3050044, Japan
[2] Natl Inst Adv Ind Sci & Technol, Nanomat Res Inst, AIST Cent 5, Tsukuba 3058565, Japan
[3] Osaka Univ, Inst Sci & Ind Res ISIR SANKEN, Osaka 5670047, Japan
[4] Aalto Univ, QTF Ctr Excellence, Dept Elect & Nanoengn, Espoo 02150, Finland
[5] Sun Yat Sen Univ, Sch Mat, Shenzhen Campus, Shenzhen 518107, Peoples R China
[6] Natl Inst Adv Ind Sci & Technol, Nano Carbon Device Res Ctr, AIST Cent 5, Tsukuba, 3058565, Japan
[7] Saitama Univ, Grad Sch Sci & Engn, Dept Chem, Saitama 3388570, Japan
[8] Agcy Sci Tech & Res A STAR, Inst Mat Res & Engn IMRE, 2 Fusionopolis Way, Singapore 138634, Singapore
[9] Natl Inst Adv Ind Sci & Technol, Nanosyst Res Inst, Tsukuba 3058560, Japan
[10] Natl Inst Mat Sci NIMS, Res Ctr Elect & Opt Mat, Tsukuba 3050044, Japan
[11] Southeast Univ, Sch Phys, Nanjing 211189, Peoples R China
关键词
1D nanotrenches; etching; photoluminescence; second harmonic generation; transition metal dichalcogenides; EFFICIENT; GROWTH;
D O I
10.1002/adfm.202405665
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Layer number-dependent band structures and symmetry are vital for the electrical and optical characteristics of 2D transition metal dichalcogenides (TMDCs). Harvesting 2D TMDCs with tunable thickness and properties can be achieved through top-down etching and bottom-up growth strategies. In this study, a pioneering technique that utilizes the migration of in situ generated Na-W-S-O droplets to etch out 1D nanotrenches in few-layer WS2 is reported. 1D WS2 nanotrenches are successfully fabricated on the optically inert bilayer WS2, showing pronounced photoluminescence and second harmonic generation signals. Additionally, the modulation of inkjet-printed Na2WO4-Na2SO4 particles to switch between the etching and growth modes by manipulating the sulfur supply is demonstrated. This versatile approach enables the creation of 1D nanochannels on 2D TMDCs. The research presents exciting prospects for the top-down and bottom-up fabrication of 1D-2D mixed-dimensional TMDC nanostructures, expanding their use for electronic and optoelectronic applications.
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页数:10
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