Process investigation of electron beam evaporation deposited amorphous silicon optical films

被引：0
|
作者：
Shu, Xiong-Wen [1 ]
Xu, Chen [1 ]
Tian, Zeng-Xia [1 ]
Luo, Dan [1 ]
Shen, Guang-Di [1 ]
机构：
[1] Optoelectronic Technology Laboratory, Beijing University of Technology, Beijing 100022, China
来源：
Guangdianzi Jiguang/Journal of Optoelectronics Laser | 2006年 / 17卷 / 08期
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页码：905 / 908
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