Source optimization using particle swarm optimization algorithm in optical lithography

被引：0
|
作者：
Wang, Lei [1 ,2 ]
Li, Sikun [1 ]
Wang, Xiangzhao [1 ,2 ]
Yan, Guanyong [1 ,2 ]
Yang, Chaoxing [1 ,2 ]
机构：
[1] Laboratory of Information Optics and Opto-Electronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai,201800, China
[2] University of Chinese Academy of Sciences, Beijing,100049, China
来源：
Guangxue Xuebao/Acta Optica Sinica | 2015年 / 35卷 / 04期
关键词：
Compendex;
D O I：
10.3788/AOS201535.0422002
中图分类号：
学科分类号：
摘要：
Photolithography
引用
收藏
相关论文
共 50 条
  • [1] Spectrum allocation algorithm using improved particle swarm optimization
    Tong, Z. (loki_tong@126.com), 1600, Huazhong University of Science and Technology (41):
  • [2] A particle swarm optimization algorithm with fully communicated information
    Lü, Qiang
    Liu, Shi-Rong
    Tien Tzu Hsueh Pao/Acta Electronica Sinica, 2010, 38 (03): : 664 - 667
  • [3] A nonlinear dynamic adapted Particle Swarm Optimization algorithm
    Wei, Qing
    Bao, Zhiguo
    International Review on Computers and Software, 2012, 7 (01) : 414 - 419
  • [4] An optimization algorithm for WNN based on immune particle swarm
    Wang, Fei
    Shi, Jianfang
    Yang, Jing
    Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics), 2011, 7004 LNAI (PART 3): : 326 - 333
  • [5] A particle swarm algorithm for optimization of complex system reliability
    Pant, Sangeeta
    Anand, Dhiraj
    Kishor, Amar
    Singh, Suraj Bhan
    International Journal of Performability Engineering, 2015, 11 (01) : 33 - 42
  • [6] Improvement and Application of Fractional Particle Swarm Optimization Algorithm
    Li, Jing
    Zhao, Chunna
    Mathematical Problems in Engineering, 2022, 2022
  • [7] Multiobjective reactive power optimization based on modified particle swarm optimization algorithm
    Liu, Shukui
    Li, Qi
    Chen, Weirong
    Lin, Chuan
    Zheng, Yongkang
    Dianli Zidonghua Shebei/Electric Power Automation Equipment, 2009, 29 (11): : 31 - 36
  • [8] Particle swarm optimization using velocity control
    Nakagawa, Naoya
    Ishigame, Atsushi
    Yasuda, Keiichiro
    IEEJ Transactions on Electronics, Information and Systems, 2009, 129 (07) : 1331 - 1336
  • [9] A self-adaptive chaos particle swarm optimization algorithm
    Wu, Yalin
    Zhang, Shuiping
    Telkomnika (Telecommunication Computing Electronics and Control), 2015, 13 (01) : 331 - 340
  • [10] Hybrid multiobjective particle swarm optimization and estimation of distribution algorithm
    Luo, Ci-Yong
    Lu, Bin
    Chen, Min-You
    Zhang, Cong-Yu
    Chongqing Daxue Xuebao/Journal of Chongqing University, 2010, 33 (04): : 31 - 36
12345