Research on the optimization of electrical properties for low-temperature sintered indium tin oxide slurry

被引:0
作者
Wang, Yu [1 ,2 ,3 ]
Dong, Helei [1 ,2 ,3 ]
Jia, Zhen [1 ,2 ,3 ]
Miao, Yuxin [1 ,2 ,3 ]
Ma, Jie [1 ,2 ,3 ]
Luo, Zhonghai [1 ,2 ,3 ]
Zhang, Lei [1 ,2 ,3 ]
Qin, Yongqiang [4 ]
Tan, Qiulin [1 ,2 ,3 ]
机构
[1] North Univ China, Key Lab Micro nano Devices & Syst, Minist Educ, Taiyuan 030051, Peoples R China
[2] North Univ China, State Key Lab Dynam Measurement Technol, Taiyuan 030051, Peoples R China
[3] North Univ China, Key Lab Elect Measurement Technol, Taiyuan 030051, Peoples R China
[4] Sci & Technol Space Phys Technol Lab, Beijing 100076, Peoples R China
基金
中国国家自然科学基金;
关键词
Ceramic materials; Slurry; Electrical properties; Thermocouple; LTCC; RAY PHOTOELECTRON-SPECTROSCOPY; ANNEALING TEMPERATURE; FABRICATION; FILMS; MICROSTRUCTURE; DEPOSITION; DESIGN;
D O I
10.1016/j.vacuum.2025.114058
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this paper, an indium tin oxide (ITO) and indium oxide (In2O3) slurry that can be used for low-temperature sintering was prepared, after which an ITO/In2O3 thermocouple was prepared on an aluminum oxide (Al2O3) ceramic substrate using a screen-printing process for verifying its comprehensive performance. The samples were treated at an annealing temperature of 900 degrees C for different times. The characterization results show that when the annealing time is set to 3 h, the ITO film has the best crystallization effect. Moreover, under this annealing condition, Sn2+ ions are more inclined to transform into Sn4+ ions, promoting the release of additional free electrons, which significantly enhances the thermoelectric effect. The test result of its electrical conductivity is 134.2 s/cm. Within the temperature range of 900 degrees C, the thermocouple has an ultra-high Seebeck coefficient of 410.91 mu V/degrees C, and the peak output voltage is 332.8 mV. The maximum repeatability error is 2.745 %. It can be seen that the slurry prepared in this paper has excellent electrical properties after sintering at 900 degrees C, and is expected to become a feasible substitute in the field of conductive slurry of low temperature co-fired ceramic (LTCC).
引用
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页数:12
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