MEMS-based nanomechanics: Influence of MEMS design on test temperature

被引：0
|
作者：
Pant, B. [1 ]
Choi, S. [1 ]
Baumert, E.K. [1 ]
Allen, B.L. [1 ]
Graham, S. [1 ]
Gall, K. [1 ]
Pierron, O.N. [1 ]
机构：
[1] G.W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, GA 30332-0405, United States
来源：
Proceedings of the Society for Experimental Mechanics, Inc. | 2012年 / 52卷 / 01期
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摘要：
36
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页码：607 / 617
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