Edge effects on material removal amount in ultra precise polishing process

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作者：
Department of Mechanical and Electronical Engineering, Xiamen University, Xiamen 361005, China [1 ]
不详 [2 ]
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来源：
Qiangjiguang Yu Lizishu | 2008年 / 10卷 / 1653-1657期
关键词：
Pressure distribution;
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