GaN film fabrication by near-atmospheric plasma-assisted chemical vapor deposition

被引：0
|
作者：
Nagata, Takahiro [1 ]
Sakuma, Yoshiki [1 ]
Uehara, Tsuyoshi [2 ]
Chikyow, Toyohiro [1 ]
机构：
[1] National Institute for Materials Science (NIMS), Tsukuba, Ibaraki 305-0044, Japan
[2] Sekisui Chemical Co., Ltd., Wadai, Tsukuba, Ibaraki 300-4292, Japan
来源：
Japanese Journal of Applied Physics, Part 2: Letters | 2007年 / 46卷 / 1-3期
关键词：
Thin films;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Journal article (JA)
引用
收藏
相关论文
共 50 条
  • [1] Novel plasma-assisted combustion route for NiOxthin film deposition
    Singh, Chetan C.
    Choudhury, Aditya N. Roy
    Sutar, D. S.
    Sarkar, Shaibal K.
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2020, 31 (22) : 19836 - 19845
  • [2] Formation of SixNy(H) and C:N:H layers by Plasma-Assisted Chemical Vapor Deposition method
    Jonas, Stanislawa
    Janus, Marta
    Jaglarz, Janusz
    Kyziol, Karol
    THIN SOLID FILMS, 2016, 600 : 162 - 168
  • [3] A Numerical and Experimental Study on the Fabrication GaN Films by Chemical Vapor Deposition
    Wong, Sun
    Jaluria, Yogesh
    JOURNAL OF MANUFACTURING SCIENCE AND ENGINEERING-TRANSACTIONS OF THE ASME, 2020, 142 (01):
  • [4] Droplet-vaporization behavior during plasma-assisted mist chemical vapor deposition of zinc oxide films
    Takenaka, Kosuke
    Setsuhara, Yuichi
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 2019, 28 (06):
  • [5] An Insight into Grain Refinement Mechanism of Ultrananocrystalline Diamond Films Obtained by Direct Current Plasma-Assisted Chemical Vapor Deposition
    Lee, Hak-Joo
    Cho, Jung-Min
    Kim, Inho
    Lee, Seung-Cheol
    Park, Jong-Keuk
    Baik, Young-Joon
    Lee, Wook-Seong
    PLASMA PROCESSES AND POLYMERS, 2014, 11 (05) : 437 - 447
  • [6] Plasma-Assisted Chemical Vapor Deposition of F-Doped MnO2Nanostructures on Single Crystal Substrates
    Bigiani, Lorenzo
    Maccato, Chiara
    Gasparotto, Alberto
    Sada, Cinzia
    Bontempi, Elza
    Barreca, Davide
    NANOMATERIALS, 2020, 10 (07) : 1 - 13
  • [7] Plasma-Assisted Approaches in Inorganic Nanostructure Fabrication
    Zheng, Jie
    Yang, Rong
    Xie, Lei
    Qu, Jianglan
    Liu, Yang
    Li, Xingguo
    ADVANCED MATERIALS, 2010, 22 (13) : 1451 - 1473
  • [8] Exploration of Plasma-Enhanced Chemical Vapor Deposition as a Method for Thin-Film Fabrication with Biological Applications
    Vasudev, Milana C.
    Anderson, Kyle D.
    Bunning, Timothy J.
    Tsukruk, Vladimir V.
    Naik, Rajesh R.
    ACS APPLIED MATERIALS & INTERFACES, 2013, 5 (10) : 3983 - 3994
  • [9] Arc Plasma-assisted Deposition of Nanocrystalline Coatings
    Krysina, O. V.
    Koval, N. N.
    Ivanov, Yu. F.
    Shugurov, V. V.
    25TH INTERNATIONAL SYMPOSIUM ON DISCHARGES AND ELECTRICAL INSULATION IN VACUUM (ISDEIV 2012), 2012, : 537 - 540
  • [10] Film Fabrication of Perovskites and their Derivatives for Photovoltaic Applications via Chemical Vapor Deposition
    Wang, Mingyue
    Carmalt, Claire J.
    ACS APPLIED ENERGY MATERIALS, 2022, 5 (05) : 5434 - 5448
12345