Simulation and experimental evaluation of a bonded-type hybrid modes linear ultrasonic motor

To achieve the performance of compact structure, low-voltage operation, and large thrust, a bonded-type hybrid modes linear ultrasonic motor was developed. In the stator of the motor, bonded type piezoelectric ceramics were adopted as excitation units. The alternating elliptical motions at two driving feet were achieved by exciting the two bending vibration modes of the stator, Bl2 and B2, thereby driving the slider in a linear motion by friction. First, the modal analysis and frequency response analysis of the stator were carried out using the finite element simulation software COMSOL. The simulation results show that the elliptical motion trajectories can be realized at two driving feet on the stator. Then, the stator was manufactured, and its admittance characteristics were tested to verify the correctness of the finite element simulation. Finally, a prototype of the ultrasonic motor was fabricated, and a series of experiments were carried out to evaluate its output characteristics. The experimental results show that under the voltage of 100 Vpp and the frequency of 66. 58 kHz, the maximum no-load speed and maximum thrust of the prototype reach 82. 9 mm/s and 0. 52 N, respectively. At a preload of 1. 2 N, the dead zone of the prototype is 12 Vpp. Under a sine driving wave with a cycle of 20, the motor achieves a step displacement of 2. 1 |xm. This study provides important theoretical and experimental basis for the design and application of bonded-type hybrid modes linear ultrasonic motors. © 2024 Chinese Vibration Engineering Society. All rights reserved.