The nano-indentation and friction/wear properties of DLC/SiC/Ti (diamond-like carbon/silicon carbide/Ti) thin films (SiC and Ti films as interlayer) deposited on Mg alloy (AZ91D) substrate .using magnetron sputtering technique at room temperature was investigated. The results show that the DLC film exhibits a low nano-hardness(4.01 GPa)and Young's modulus (40.53 GPa) but the rati-o of hardness to modulus (0.10) is high. When sliding against Si3N4 (silicon nitride) ball using ball-on-disc frictional and wear tester under dry frictional condition, the films-substrate system exhibits a good film-substrate adhesion and a good friction/wear properties with the friction coefficient about 0.19. The special wear rate is decreased 3 orders of magnitude together with little film cracking and interface delaminating after long time worn (3.5h). The film-substrate systems greatly improve the friction/wear properties of magnesium alloy.