Design and analysis of MEMS vibrating ring gyroscope considering high-g shock reliability

被引:2
作者
Yoon, Sung-Jin [1 ]
Park, U.-Sung [1 ]
机构
[1] Dept. of Agency for Defense Development, Korea, Republic of
关键词
Gyroscope; High-g; MEMS; Shock reliability;
D O I
10.5370/KIEE.2015.64.10.1440
中图分类号
O24 [计算数学];
学科分类号
070102 ;
摘要
This paper describes a study for anti high-shock design of MEMS vibrating ring gyroscope. Structure models was made by MEMS technology processing. MEMS Vibrating Ring Gyroscope mechanical structure were not only anti-high shock simulated with the LS Dyna Ver 971 software but also with mathematical analysis and the finite element method in order to confirm the shock reliability. Shock test result of a MEMS vibrating gyroscope being developed to have gun-hardened survivability while maintaining tactical grade navigation performance for application to various guided projectiles. © 2015 The Korean Institute of Electrical Engineers.
引用
收藏
页码:1440 / 1447
页数:7
相关论文
共 50 条
[41]   Design and Application of a High-G Piezoresistive Acceleration Sensor for High-Impact Application [J].
Hu, Xiaodong ;
Mackowiak, Piotr ;
Baeuscher, Manuel ;
Ehrmann, Oswin ;
Lang, Klaus-Dieter ;
Schneider-Ramelow, Martin ;
Linke, Stefan ;
Ngo, Ha-Duong .
MICROMACHINES, 2018, 9 (06)
[42]   Design, Analysis, and Simulation of a MEMS Tuning Fork Gyroscope with a Mechanical Amplification Structure [J].
Hu, Haotian ;
Calusi, Benedetta ;
Bagolini, Alvise ;
Pantano, Maria F. .
MICROMACHINES, 2025, 16 (02)
[43]   Effect of nonlinear electrostatic forces on the dynamic behaviour of a capacitive ring-based Coriolis Vibrating Gyroscope under severe shock [J].
Chouvion, B. ;
McWilliam, S. ;
Popov, A. A. .
MECHANICAL SYSTEMS AND SIGNAL PROCESSING, 2018, 106 :395-412
[44]   Key technologies disclosure for the high-g shock tester based on collision principle and experimental study [J].
Duan, Zhengyong ;
Tang, Dayong ;
Zeng, Qihang ;
Peng, Yingchun .
REVIEW OF SCIENTIFIC INSTRUMENTS, 2023, 94 (03)
[45]   Design and performance analysis of PLL based self oscillation loop in vibrating gyroscope - art. no. 60401B [J].
Chang, BS ;
Lee, JG ;
Kang, T ;
Sung, WT .
ICMIT 2005: Mechatronics, MEMS, and Smart Materials, 2005, 6040 :B401-B401
[46]   A micromachined piezoresistive high-g accelerometer with high sensitivity and wide frequency-band: Design and modeling [J].
Wang, ZK ;
Zong, DG ;
Lu, DR ;
Xiong, B ;
Wang, YL ;
Bao, MH .
INTERNATIONAL JOURNAL OF NONLINEAR SCIENCES AND NUMERICAL SIMULATION, 2002, 3 (3-4) :307-310
[47]   Design and Analysis of a MOEMS Gyroscope Based on a Ring-Shaped Hybrid Structure [J].
Jalal Gholinejad ;
Kambiz Abedi .
Plasmonics, 2023, 18 :1159-1172
[48]   Design and Analysis of a MOEMS Gyroscope Based on a Ring-Shaped Hybrid Structure [J].
Gholinejad, Jalal ;
Abedi, Kambiz .
PLASMONICS, 2023, 18 (03) :1159-1172
[49]   Design and simulation of a MEMS high G inertial impact sensor [J].
Wang, Y. P. ;
Hsu, R. Q. ;
Wu, C. W. .
2008 IEEE SENSORS APPLICATIONS SYMPOSIUM, 2008, :95-+
[50]   A Novel Design of High Resolution MEMS Gyroscope Using Mode-Localization in Weakly Coupled Resonators [J].
Bukhari, Syed Ali Raza ;
Saleem, Muhammad Mubasher ;
Hamza, Amir ;
Bazaz, Shafaat Ahmed .
IEEE ACCESS, 2021, 9 :157597-157608