共 50 条
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Design and Analysis of Polysilicon Thin Layers and MEMS Vibrating Structures
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2014 SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS (DTIP),
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Design and development of a MEMS vibrating ring resonator with inner rose petal spring supports
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MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,
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Design and fabrication of the high Q gyroscope with ring spring structure
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2016 11TH INTERNATIONAL FORUM ON STRATEGIC TECHNOLOGY (IFOST), PTS 1 AND 2,
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A monolithic high-g SOI-MEMS accelerometer for measuring projectile launch and flight accelerations
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PROCEEDINGS OF THE IEEE SENSORS 2004, VOLS 1-3,
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HIGH-G MEMS SHOCK THRESHOLD SENSOR INTEGRATED ON A COPPER FILLING THROUGH-GLASS-VIA (TGV) SUBSTRATE FOR SURFACE MOUNT APPLICATION
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2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS),
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Finite Element Analysis of a MEMS-Based High G Inertial Shock Sensor
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NSTI NANOTECH 2008, VOL 3, TECHNICAL PROCEEDINGS: MICROSYSTEMS, PHOTONICS, SENSORS, FLUIDICS, MODELING, AND SIMULATION,
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Design, microfabrication and analysis of polysilicon thin layers for MEMS vibrating structures
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Analog Integrated Circuits and Signal Processing,
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The design and test of a high g MEMS accelerometer
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PROCEEDINGS OF THE INTERNATIONAL CONFERENCE ON MECHANICAL ENGINEERING AND MECHANICS 2005, VOLS 1 AND 2,
2005,
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