共 50 条
[21]
The Optimal Shape of MEMS Beam Under High-G Shock Based on a Probabilistic Fracture Model
[J].
2022 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM (IRPS),
2022,
[22]
DEVELOPMENT OF A HIGH-G SHOCK SENSOR BASED ON MEMS TECHNOLOGY FOR MASS-MARKET APPLICATIONS
[J].
2019 6TH IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS & SYSTEMS (INERTIAL 2019),
2019,
[23]
ADVANCEMENT IN THE MEMS GYROSCOPE FROM A VIBRATING TUNING FORK TO A TUNED RING WITH COMB ELECTRODES
[J].
2024 IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS AND SYSTEMS, INERTIAL,
2024,
[24]
Lattice Structure for a Critically Damped High-G MEMS Accelerometer
[J].
2013 SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS (DTIP),
2013,
[25]
High-G Shock Reliability of 3-D Integrated Structure Microsystem Based on Finite Element Simulation
[J].
IEEE TRANSACTIONS ON COMPONENTS PACKAGING AND MANUFACTURING TECHNOLOGY,
2021, 11 (08)
:1243-1249
[26]
Mems-based gyroscope: Design, analysis and simulation
[J].
PROCEEDINGS OF THE ASME 2ND MULTIFUNCTIONAL NANOCOMPOSITES AND NANOMATERIALS CONFERENCE 2008: DESIGN AND MODELING OF NANOCOMPOSITES AND NANOMATERIALS - FABRICATION OF NANOCOMPOSITES, MATERIALS AND DEVICES - MULTIFUNCTIONALITIES IN NANOCOMPOSITES AND NANOMATERIALS - NANOMATERIALS FOR BIOMEDICAL APPLICATIONS,
2008,
:27-31
[28]
Research of Reliability for Measuring High-g Micro Array Acceleration Sensor
[J].
2008 15TH INTERNATIONAL CONFERENCE ON MECHATRONICS AND MACHINE VISION IN PRACTICE (M2VIP),
2008,
:412-417
[29]
Design, modelling and simulation of a High Frequency MEMS Gyroscope in 1.5um SOI
[J].
PROCEEDINGS OF THE EUROSENSORS XXIII CONFERENCE,
2009, 1 (01)
:903-+
[30]
Design, simulation and multi-dimension coupling research of monolithic MEMS three-axis high-G accelerometer
[J].
2007 INTERNATIONAL CONFERENCE ON INFORMATION ACQUISITION, VOLS 1 AND 2,
2007,
:281-285