On application of interference of millimeter and submillimeter waves for diagnostics of photoconductivity depth distribution in semiconductor wafers

被引：0
作者：
Moscow State University, Leninskie gory, Moscow 119992, Russia [1 ]
不详 [2 ]
机构：
[1] Moscow State University, Leninskie gory
[2] Moscow Automobile and Road Construction Institute, State Technical University, Moscow 125319
来源：
Bull. Russ. Acad. Sci. Phys. | 2008年 / 1卷 / 108-112期
关键词：
Light modulation - Opacity - Optical resonators - Photoconductivity - Submillimeter waves;
D O I：
10.1007/s11954-008-1025-4
中图分类号：
学科分类号：
摘要：
The interference of millimeter and submillimeter waves in a high-resistivity semiconductor wafer illuminated by modulated light and located in the waist plane of a open resonator perpendicularly to its axis is considered. It is shown that measurements of the modulation depth of the transmittance of such a resonator at certain frequencies at several wafer positions make it possible to reconstruct the photoconductivity depth distribution. The effect of different experimental errors on the reconstruction accuracy is estimated. © Allerton Press, Inc. 2008.
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页码：108 / 112
页数：4
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