Subsurface microscopy of integrated circuits with angular spectrum and polarization control

被引：23

作者：

Köklü, F.H. ^{[1
]}

Ippolito, S.B. ^{[2
]}

Goldberg, B.B. ^{[1
]}

Ünlü, M.S. ^{[1
]}

机构：

[1] Department of Physics, Electrical and Computer Engineering and the Photonics Center, Boston University, Boston, MA 02215

[2] IBM Semiconductor Research and Development Center, Hopewell Junction

来源：

Optics Letters | 2009年 / 34卷 / 08期

关键词：

Spectrum analysis - Polarization - Timing circuits;

D O I：

10.1364/OL.34.001261

中图分类号：

学科分类号：

摘要：

We investigate the effect of an annular pupil-plane aperture in confocal imaging while using an NA increasing lens. We show that focal spot shape is highly sensitive to both polarization and angular spectrum of the incoming light. We demonstrate a lateral spatial resolution of 145 nm (λ0/9) in the direction perpendicular to the polarization direction. © 2009 Optical Society of America.

引用

页码：1261 / 1263

页数：2

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